3D displays

Report
Optical MEMS Laboratory - OML
Prof. Dr. Hakan Ürey
Koç University, Electrical Engineering
RESEARCH AREAS
•2D/3D Display and Imaging Systems
•MEMS/NEMS sensors and actuators
•Micro-optics and screen technologies
•Optical system design
Infrastructure
OML is well-equipped for electrical, optical, mechanical
design, test, and characterization
Test Area
Measurement
Cleanroom
Office Area
Test Area
Meeting Room
Infrastructure
OML is well-equipped for electrical, optical, mechanical
design, test, and characterization
Office Area
Measurement
Cleanroom
Test Area
Fabrication
Cleanroom
Projects
-Industrial Funding (>10 projects) •
• Microvision (USA, since 2002),
Aselsan (TR), Fraunhofer IPMS •
(DE), OPET (TR), Inventram
(TR), Fotoniks (TR)
•
•
- EC Funded Projects (7 projects)
• ERC-Advanced (2014-2019)
• FP7 STREP projects (MEMFIS, •
HELIUM3D)
•
• FP7 IAPP Project
• FP6 Networks (NEMO, 3DTV,
MINOS)
- TÜBİTAK (8 projects)
• 5 projects completed
• 3 projects on-going
3D displays (3D laser TV, wearable displays, head-worn
projection displays);
Pico-projectors and Laser scanners (world leader in
MEMS scanners);
Micro-optics (head-up-displays, exit pupil expanders);
MEMS Spectrometers (MEMS-based Fourier transform
infrared spectrometer, Lamellar grating interferometers,
FR4 based interferometers);
Thermal imaging (MEMS based thermal detector array
with optical readout; CMOS optical ROIC);
Portable Nano-Biosensor (MEMS sensor array for multianalyte screening for diagnostics applications).
Patents and Spin-Offs
• Patent Licensing Agreements
(consists a portfolio of about 25 patents)
– Microvision Inc. (USA): MEMS and FR4 scanners, 3D displays, novel
micro-optical screens
– Fraunhofer IPMS (DE): MEMS spectrometers
– Aselsan Inc. (TR): Thermal imaging sensor array
– Inventram Inc. (TR): Biosensors for point-of-care diagnostics of
multiple diseases.
– Opet Inc. (TR): Tagging and identification of functional fluids
• Spin-off companies from the lab
– Tarabios (bio-tech)
– Quantag (energy)
OML Research on Emerging Display Tech., 3D,
AR, and Human-Computer Interaction
Wearable Displays
Eyewear displays
Pico-projectors
3D Picop
Dynamic Pupil
Tracker
AR Bidirectional
Screens
Multi-viewer 3D
3D HMPD
3D Telepresence
OML Research on MEMS Laser Scanners for Displays
and Imaging
Outer
frame
Comb-drive
(Electromagnetic, MEMS)
Yalcinkaya, JMEMS, 2006
Inner
flexure
Outer
flexure
(Electrostatic MEMS) Arslan,
JMEMS, 2010
(Rotary Electrostatic, MEMS)
Baran, JMEMS, 2012
(Thin Film Magnetic, FR4)
Yalcinkaya, Sens&Act:A, 2007
(Piezoelectric, MEMS)
Baran, JMEMS, 2012
(Microlens array on 2D MEMS Stage
Gokce, JMEMS, 2010
(Integrated Electromagnetic, FR4)
Isikman, Phot. Tech. Lett., 2009
Biosensors for POC Diagnostics:
Immunosassay, Viscosity & Coagulation Tests
READER
Cartridge
Optical
Read-out
Oscillating Cantilever
Lock-in Amplifier
Phase and Amplitude read-out
Reader
Ni
Si
CARTRIDGE
Current
Signal
Generator Amplifier
MEMS Chip
Frequency Shift [ppm]
10000
1000
100
10
1
0,01
Coil for magnetic
actuation
Virus Detection
Hep A Antigen 1
Hep A Antigen 2
Hep C Antigen
Hep A Negative Control
Hep C Negative Control
0,1
1
10
Concentration [ng/ml]
Timurdogan et al, Biosens & Bioelec, 2011
Coagulation
Measurement
100
Cakmak et al, Methods, 2013
150um
Laser
Spot
Thermal Imaging Using Thermo-Mechanical Pixels
and Optical Readout
Single pixel
1st
order
Sensor
Input
Array (35um and 50um
pixel sizes)
Image and video acquisition
using discrete optics
MEMS/CMOS Integration
100
200
300
400
500
600
700
OML Research on MEMS FT Spectrometers
FP7-Strep Project: MEMFIS
Partners: Bruker, KOC, FhG-IPMS, VIGO, SOPRALAB, CTR, Teknikon
IR Source
fRES =462Hz
Reference
Laser
-1st
0th
PD
1st
MEMS device
Elliptic
reflectors
Sample
Plane
IR
Detector
Ataman, JMM, 2006 - Seren, JMEMS, 2012 Ferhanoglu, Opt. Exp., 2010
3µ
m
70µ 70µ 217µ
217µ
Comb
m actuators
m
on the springs
364µ
438µ
m
658µ
511µ658µ
585µ
m
m
Grating fingers
Summary
• We’re open to collaboration in photonics, MEMS, and humancomputer interaction related projects
• Photonics KET2014, suitable topics:
– Biophotonics for screening of diseases
– Sensing for safety and security
• FET-Open projects
• You can visit our lab today (Eng Z16)
Contact:
Prof. Dr. Hakan Urey
E-mail: [email protected]
Group Web Site: http://mems.ku.edu.tr

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